RT info:eu-repo/semantics/article T1 InN-based optical waveguides developed by RF sputtering for all-optical applications at 1.55 μm A1 Monteagudo Lerma, Laura A1 Naranjo Vega, Fernando Bernabé A1 Jiménez Rodríguez, Marco A1 Postigo, P.A. A1 Barrios, E. A1 Corredera, Pedro A1 González Herráez, Miguel K1 Active waveguides K1 All-optical devices K1 Indium nitride K1 Nonlinear optics K1 Sputtering K1 Ciencias tecnológicas K1 Electrónica K1 Technology K1 Electronics AB We report on the design, fabrication, and optical characterization of InN-based optical waveguides aiming at their application as all-optical limiters at 1.55 $\mu \text{m}$. The InN guiding layers are grown by radio frequency (RF) sputtering on sapphire substrates. Experimental cutback method and nonlinear optical transmittance measurements were performed for the developed devices. The waveguides present nonlinear behavior associated with two photon absorption process. A nonlinear absorption coefficient ranging from $\sim 43$ to 114 cm/GW is estimated from optical measurements. These results open the possibility of using RF sputtering as a low cost and thermally harmless technique for the development and overgrowth of InN-based optical waveguides in future III-nitride all-optical integrated circuits working at telecom wavelengths PB IEEE SN 1041-1135 YR 2015 FD 2015-09-01 LK http://hdl.handle.net/10017/32165 UL http://hdl.handle.net/10017/32165 LA eng NO Ministerio de Economía y Competitividad DS MINDS@UW RD 25-abr-2024